JPS6210656Y2 - - Google Patents

Info

Publication number
JPS6210656Y2
JPS6210656Y2 JP1980019593U JP1959380U JPS6210656Y2 JP S6210656 Y2 JPS6210656 Y2 JP S6210656Y2 JP 1980019593 U JP1980019593 U JP 1980019593U JP 1959380 U JP1959380 U JP 1959380U JP S6210656 Y2 JPS6210656 Y2 JP S6210656Y2
Authority
JP
Japan
Prior art keywords
vacuum pump
flow rate
nozzle
gas flow
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980019593U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56122930U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980019593U priority Critical patent/JPS6210656Y2/ja
Publication of JPS56122930U publication Critical patent/JPS56122930U/ja
Application granted granted Critical
Publication of JPS6210656Y2 publication Critical patent/JPS6210656Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Flowmeters (AREA)
JP1980019593U 1980-02-20 1980-02-20 Expired JPS6210656Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980019593U JPS6210656Y2 (en]) 1980-02-20 1980-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980019593U JPS6210656Y2 (en]) 1980-02-20 1980-02-20

Publications (2)

Publication Number Publication Date
JPS56122930U JPS56122930U (en]) 1981-09-18
JPS6210656Y2 true JPS6210656Y2 (en]) 1987-03-13

Family

ID=29615841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980019593U Expired JPS6210656Y2 (en]) 1980-02-20 1980-02-20

Country Status (1)

Country Link
JP (1) JPS6210656Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071433A (ja) * 2000-09-05 2002-03-08 Hirai:Kk 流量計校正装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7122102B2 (ja) 2017-11-08 2022-08-19 東京エレクトロン株式会社 ガス供給システム及びガス供給方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224556A (en) * 1975-08-20 1977-02-24 Hitachi Ltd Caburetter flow-rate tester

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071433A (ja) * 2000-09-05 2002-03-08 Hirai:Kk 流量計校正装置

Also Published As

Publication number Publication date
JPS56122930U (en]) 1981-09-18

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